EdwinAMartin
Diamond Member
- Mar 6, 2026
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In 1958, Dr Willi Becker invented the first turbomolecular vacuum pump at Pfeiffer Vacuum+Fab Solutions – and set a new standard in vacuum technology. His innovation revolutionized vacuum generation, making it possible to achieve unprecedented conditions in the high and ultra-high vacuum range. His technology uses high-speed rotors to generate high, ultra-high, and even extremely high vacuum levels down to 10-11 hPa (mbar).
To function effectively, turbomolecular vacuum pumps – commonly known as turbopumps – must be operated in combination with backing pumps at their exhaust, which reduce the backing pressure from atmospheric to rough or medium vacuum. This combination is crucial in semiconductor manufacturing, scientific research, space exploration, and various industrial as well as analytical applications.
Modern chip tech wouldn't be possible without it, as would many laser applications.
